Semiconductor
Clean Handling, Zero Contamination
Deeply specialized in cleanroom logistics automation for semiconductor wafer fabs, packaging houses, and chip testing facilities, breaking through manual handling yield bottlenecks with ultra-low vibration AMRs and intelligent scheduling.
Core Semiconductor Logistics Challenges
Demanding Cleanroom Environment
Wafer transport must occur in Class 1~1000 clean environments. Particle contamination from standard AMRs directly causes process scrap.
Extremely Low Vibration Tolerance
12-inch wafers are highly sensitive to acceleration changes. Transport jolts can cause micro-cracks in wafers worth hundreds of thousands.
Narrow Process Window, High Yield Pressure
Critical processes like photolithography and etching have ppm-level parameter windows, requiring extreme precision in material delivery timing.
Our Solutions
Four Solutions Built for Semiconductor
Ultra-Low Vibration AMR (Active Isolation)
Active vibration-dampening chassis designed for cleanrooms. Peak vibration < 5μm/s, vibration sync ±2μm/s, fully meeting 12-inch wafer OHT-grade transport requirements, compliant with SEMI S2 standards.
FFU Positive Pressure Filtration Module
HEPA-grade clean filtration unit ensuring continuous positive pressure clean airflow from the AMR, eliminating particle contamination with 99.999% isolation efficiency.
Multi-Unit Coordinated Scheduling (VDA 5050)
Supports task priority queuing, Buffer management, and seamless handoff with OHT overhead transport within AMHS processes. Supports 500+ concurrent agent scheduling.
Digital Twin Full Traceability
Transport trajectory, environmental parameters, and process handoff times are uploaded in real time for every wafer box, meeting semiconductor full-process traceability requirements. AI fault prediction accuracy > 92%.
Clean Handling,
Zero Compromise
Case Study: 12-inch Wafer Handling
Explore how our active vibration isolation technology designed for semiconductor cleanrooms improves transport efficiency by 200% while maintaining zero contamination.
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